The physics of microfabrication /
Brodie, Ivor.
The physics of microfabrication / Ivor Brodie and Julius J. Muray. - New York : Plenum Press, c1982. - xix, 503 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0306408635 9780306408632 : Unpriced
82003835
Microelectronics.
Thin-film circuits.
Microfabrication.
Electrical engineering
Electronic devices & materials
Applied optics
Microelectronic devices Design & manufacture
621.3817
The physics of microfabrication / Ivor Brodie and Julius J. Muray. - New York : Plenum Press, c1982. - xix, 503 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0306408635 9780306408632 : Unpriced
82003835
Microelectronics.
Thin-film circuits.
Microfabrication.
Electrical engineering
Electronic devices & materials
Applied optics
Microelectronic devices Design & manufacture
621.3817