Excimer lasers : applications, beam delivery systems, and laser design : 18-19 November 1992, Boston, Massachusetts /
Excimer lasers : applications, beam delivery systems, and laser design : 18-19 November 1992, Boston, Massachusetts /
James A. Greer, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Bellingham, Wash., USA : SPIE, c1993.
- vii, 222 p. : ill. ; 28 cm.
- Proceedings / SPIE--the International Society for Optical Engineering ; v. 1835 .
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1835. .
Includes bibliographical references and index.
0819410365 (pbk.) 9780819410368
92063069
Excimer lasers--Congresses
621.366
Includes bibliographical references and index.
0819410365 (pbk.) 9780819410368
92063069
Excimer lasers--Congresses
621.366