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Demystifying chipmaking / by Richard F. Yanda, Michael Heynes and Anne K. Miller.

By: Contributor(s): Material type: TextTextSeries: Demystifying technology seriesPublication details: Oxford : Newnes ; Amsterdam : Elsevier, 2005.Description: xvii, 256 p. : ill. ; 24 cmISBN:
  • 9780750677608:
  • 0750677600
Subject(s): DDC classification:
  • 621.39732
Online resources:
Contents:
IC Fabrication Overview -- Support Technologies -- Forming Wells -- Isolate Active Areas (Shallow Trench Isolation) -- Building the Transistors -- First Level Metallization -- Multilevel Metal Interconnects and Dual Damascene -- Test and Assembly -- APPENDIX A: Science Overview -- APPENDIX B: Plasma Etch Supplement to Chapter 4
Holdings
Item type Current library Call number Copy number Status Date due Barcode
General Lending Carlow Campus Library General Lending 621.39732 (Browse shelf(Opens below)) 1 Available 58624
General Lending Carlow Campus Library General Lending 621.39732 (Browse shelf(Opens below)) 1 Checked out 19/06/2019 58625

CW508

CD-ROM includes video files detailing IC fabrication processes.

Includes bibliographical references and index.

IC Fabrication Overview -- Support Technologies -- Forming Wells -- Isolate Active Areas (Shallow Trench Isolation) -- Building the Transistors -- First Level Metallization -- Multilevel Metal Interconnects and Dual Damascene -- Test and Assembly -- APPENDIX A: Science Overview -- APPENDIX B: Plasma Etch Supplement to Chapter 4

Includes CD-ROM.

39.56

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