Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California / Barbara Vasquez ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Material type: TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1802.Publication details: Bellingham, Wash. : SPIE, c1993.Description: x, 258 p. : ill. ; 28 cmISBN:- 0819410004
- 9780819410009
- 621.381
Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
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Includes bibliographical references and index.
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