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Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California / Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

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Material type: Text

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TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1594.Publication details: Bellingham, Wash. : SPIE, c1992.Description: ix, 419 p. : ill. ; 28 cmISBN:

0819407259 (pbk.)
9780819407252

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DDC classification:

621.381

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Title notes ( 2 )

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Item type	Current library	Call number	Copy number	Status	Date due	Barcode
General Lending	Carlow Campus Library Store - Ask Library Staff	621.381 (Browse shelf(Opens below))	1	Available		30366

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Previous	621.381 Electrical principles IV : a textbook covering the Level IV syllabus of the Technician Education Council /	621.381 Analog and digital electronics : a first course /	621.381 Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California /	621.381 Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California /	621.381 International Conference of Microelectronics--Microelectronics '92 : 21-23 September 1992, Warsaw, Poland /	621.381 Electronics reliability: calculation and design,	621.381 Handbook of components for electronics /	Next

Includes bibliographical references and index.

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