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Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California / James Bondur ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Material type:
TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1803.Publication details: Bellingham, Wash., USA : SPIE, c1993.Description: x, 404 p. : ill. ; 28 cmISBN: - 0819410012 (pbk.)
- 621.3815
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| General Lending | Carlow Campus Library Store - Ask Library Staff | 621.3815 (Browse shelf(Opens below)) | 1 | Available | 30440 |
Includes bibliographical references and author index.
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