Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California / Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

Contributor(s):

Material type: Text

Subject(s):

DDC classification:

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
General Lending	Carlow Campus Library Store - Ask Library Staff	621.381 (Browse shelf(Opens below))	1	Available		30366

Includes bibliographical references and index.

0.00