Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California / Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Material type: TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1594.Publication details: Bellingham, Wash. : SPIE, c1992.Description: ix, 419 p. : ill. ; 28 cmISBN:- 0819407259 (pbk.)
- 9780819407252
- 621.381
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Includes bibliographical references and index.
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