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10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California / sponsored by Bacus International.
Material type:
TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1496.Publication details: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1991.Description: v, 315 p. : ill. ; 28 cmISBN: - 0819406058
- 9780819406057
- 621.38152
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| General Lending | Carlow Campus Library Store - Ask Library Staff | 621.38152 (Browse shelf(Opens below)) | 1 | Available | 30328 |
Includes bibliographical references and index.
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