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		The physics of microfabrication / Ivor Brodie and Julius J. Muray. by Brodie, Ivor Muray, Julius J Material type: Text; Format: print ; Literary form: Not fiction Publication details: New York : Plenum Press, c1982 Availability: Items available for loan: Carlow Campus Library (1)Call number: 621.3817. Place hold Place recall Add to cart (remove)
		No cover image available Handbook of microlithography, micromachining, and microfabrication : Volume 1: microlithography / P. Rai-Choudhury, editor. by Rai-Choudhury, P Series: SPIE Press monograph ; PM39-PM40 \| IEE materials & devices series ; 12A-12B. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, c1997 Other title: Microlithography, micromachining, and microfabrication Availability: Items available for reference: Carlow Campus Library: Not for loan (1)Call number: 621.381531. Place recall Add to cart (remove)
		No cover image available Handbook of microlithography, micromaching, and microfabrication : Volume 2 : micromachining and microfabrication / P. Rai-Choudhury, editor. by Rai-Choudhury, P Series: SPIE Press monograph ; PM39-PM40 \| IEE materials & devices series ; 12. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Bellingham, Wa. : London : SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997 Availability: Items available for reference: Carlow Campus Library: Not for loan (1)Call number: 621.381531. Place recall Add to cart (remove)
		Robotic microassembly [electronic resource] / edited by Michaël Gauthier, Stéphane Régnier. by Gauthier, Michäel, 1975- Régnier, Stéphane Material type: Text; Format: available online ; Literary form: Not fiction Publication details: Piscataway, N.J. : Hoboken, N.J. : IEEE Press ; John Wiley & Sons, c2010 Online access: Read this electronic book via the web Send a message to library staff if access to this online resource is unavailable Availability: No items available. Place recall Add to cart (remove)

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