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| 001 | 25684134 | ||
| 005 | 20201215151655.0 | ||
| 008 | 980303s1992 waua b 101 0 eng | ||
| 010 | _a91067548 | ||
| 020 | _a0819407267 | ||
| 020 | _a9780819407269 | ||
| 040 |
_aDLC _cDLC _dOCL |
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| 049 | _aTIZA | ||
| 245 | 0 | 0 |
_aRapid thermal and integrated processing : _b10-11 September 1991, San Jose, California / _cMehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering. |
| 260 |
_aBellingham, Wash. : _bSPIE, _cc1992. |
||
| 300 |
_aix, 207 p. : _bill. ; _c28 cm. |
||
| 490 | 1 |
_aProceedings / SPIE--the International Society for Optical Engineering ; _vv. 1595 |
|
| 500 | _a"Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xHeat treatment _vCongresses _952563 |
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| 650 | 0 |
_aSemiconductor doping _vCongresses _952564 |
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| 650 | 0 |
_aVapor-plating _vCongresses _952565 |
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| 700 | 1 |
_aMoslehi, Mehrdad M. _929899 |
|
| 700 | 1 |
_aSingh, Rajendra, _d1946- _924581 |
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| 700 | 1 |
_aKwong, Dim-Lee. _929940 |
|
| 710 | 2 |
_aSociety of Photo-optical Instrumentation Engineers. _913311 |
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| 830 | 0 |
_aProceedings of SPIE--the International Society for Optical Engineering ; _vv. 1595. _910479 |
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