000			01482cam a2200337 a 4500
001			25358127
005			20201215151656.0
008			910717s1992 waua b 101 0 eng
010			_a91062692
020			_a0819406759
020			_a9780819406750
040			_aDLC _cDLC _dCUI _dMCS _dCUS _dSOI _dOCL
049			_aTIZA
245	0	0	_aMultilayer optics for advanced x-ray applications : _b22-23 July 1991, San Diego, California / _cNatale M. Ceglio, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
260			_aBellingham, Wash. : _bSPIE, _cc1992.
300			_avii, 242 p. : _bill. ; _c28 cm.
490	1		_aProceedings / SPIE--the International Society for Optical Engineering ; _vv. 1547
500			_a"Part of a five-conference program ... held at SPIE's 1991 International Symposium on Optical Applied Science and Engineering, 21-26 July 1991"--P. v.
504			_aIncludes bibliographical references and index.
650		0	_aX-ray optics _vCongresses _952587
650		0	_aThin films, Multilayered _vCongresses _952588
650		0	_aX-ray lithography _vCongresses _949946
700	1		_aCeglio, Natale M. _921107
710	2		_aSociety of Photo-optical Instrumentation Engineers. _913311
830		0	_aProceedings of SPIE--the International Society for Optical Engineering ; _vv. 1547. _910479
902			_a051022
903			_aMARS
907			_a.b10114233 _bnone _c-
942			_n0
998			_b1 _c010829 _dm _ea _f- _g0
999			_c11243 _d11243