| 000 | 02541cam a2200601 a 4500 | ||
|---|---|---|---|
| 001 | BDZ0007179187 | ||
| 003 | StDuBDS | ||
| 005 | 20190531160422.0 | ||
| 006 | m d | ||
| 007 | cr gn| | ||
| 008 | 050928s2006 njua b 001 0 eng d | ||
| 010 | _a2005028448 | ||
| 020 |
_a9780471784067: _c£47.50 |
||
| 020 | _a0471784060 (cloth : alk. paper) | ||
| 020 | _a9780471784067 (cloth : alk. paper) | ||
| 020 | _a0471790281 (electronic bk.) | ||
| 020 | _a9780471790280 (electronic bk.) | ||
| 035 | _a(OCoLC)85820981 | ||
| 040 |
_aStDuBDS _beng _cStDuBDS _dUk _dStDuBDSZ |
||
| 049 | _aTIZA | ||
| 050 | 0 | _b.M379 2006 | |
| 072 | 7 |
_aTJ _2thema |
|
| 072 | 7 |
_aTJFD _2thema |
|
| 072 | 7 |
_aTJFM _2thema |
|
| 082 | _a621.38152 | ||
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor manufacturing and process control / _cGary S. May, Costas J. Spanos. |
| 260 |
_aHoboken, N.J. : _bIEEE Wiley-Interscience, _aChichester : _bJohn Wiley [distributor], _c2006. |
||
| 300 |
_axix, 463 p. : _bill. ; _c25 cm. |
||
| 500 | _aIT Carlow ebook | ||
| 500 | _aIEEE ebook | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _aIntroduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. | |
| 650 | 0 |
_aSemiconductors _xDesign and construction |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction _94737 |
|
| 650 | 0 |
_aProcess control _xStatistical methods _99581 |
|
| 650 | 7 |
_aElectronics & communications engineering _2thema |
|
| 650 | 7 |
_aElectronic devices & materials _2thema |
|
| 650 | 7 |
_aAutomatic control engineering _2thema |
|
| 700 | 1 | _aSpanos, Costas J. | |
| 710 | 2 | _aJohn Wiley & Sons. | |
| 776 | 1 |
_cOriginal _z0471784060 _w(DLC) 2005028448 _w(OCoLC)61821738 |
|
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/ecip061/2005028448.html |
| 856 | 4 | 0 |
_yRead this electronic book via the web _uhttp://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952 |
| 856 | 4 | 1 |
_ySend a message to library staff if access to this online resource is unavailable _umailto:libdesk@itcarlow.ie?subject=Resource%20unavailable |
| 902 | _a160105 | ||
| 907 |
_a.b10373676 _bnone _c- |
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| 999 |
_c35497 _d35497 |
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