000 01296cam a2200337 a 4500
001 27969648
005 20201215151218.0
008 931020s1993 waua b 101 0 eng d
010 _a92063069
020 _a0819410365 (pbk.)
020 _a9780819410368
040 _aOWpIT
_cDLC
_dOCL
042 _alccopycat
049 _aTIZA
_b26703
082 _a621.366
245 0 0 _aExcimer lasers :
_bapplications, beam delivery systems, and laser design : 18-19 November 1992, Boston, Massachusetts /
_cJames A. Greer, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
260 _aBellingham, Wash., USA :
_bSPIE,
_cc1993.
300 _avii, 222 p. :
_bill. ;
_c28 cm.
490 1 _aProceedings / SPIE--the International Society for Optical Engineering ;
_vv. 1835
504 _aIncludes bibliographical references and index.
590 _a0.00
650 0 _aExcimer lasers
_vCongresses
_946123
700 1 _aGreer, James A.
_930019
710 2 _aSociety of Photo-optical Instrumentation Engineers.
_913311
830 0 _aProceedings of SPIE--the International Society for Optical Engineering ;
_vv. 1835.
_910479
902 _a150908
903 _aMARS
907 _a.b10085063
_bcstor
_c-
942 _n0
998 _b1
_c010425
_dm
_ea
_f-
_g0
999 _c8445
_d8445