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| 008 | 930401s1993 waua b 101 0 eng | ||
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_aMicroelectronics manufacturing and reliability : _b21-22 September 1992, San Jose, California / _cBarbara Vasquez ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering. |
| 260 |
_aBellingham, Wash. : _bSPIE, _cc1993. |
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| 300 |
_ax, 258 p. : _bill. ; _c28 cm. |
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| 490 | 1 |
_aProceedings / SPIE--the International Society for Optical Engineering ; _vv. 1802 |
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| 504 | _aIncludes bibliographical references and index. | ||
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_aIntegrated circuits _xDesign and construction _vCongresses _946501 |
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_aIntegrated circuits _xTesting _vCongresses _946502 |
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_aElectronics & communications engineering _2thema _946503 |
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_aElectronic devices & materials _2thema _931076 |
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_aApplied optics _2thema _931387 |
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_aVasquez, Barbara. _928541 |
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_aSociety of Photo-optical Instrumentation Engineers. _913311 |
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_aProceedings of SPIE--the International Society for Optical Engineering ; _vv. 1802. _910479 |
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