000			01526cam a2200349 a 4500
001			25681025
005			20201215151519.0
008			920316s1992 waua b 101 0 eng
010			_a92080024
020			_a0819407038 (pbk.)
020			_a9780819407030
040			_aDLC _cDLC _dOCL
049			_aTIZA _b30470
082			_a670.42
245	0	0	_aCommercial applications of precision manufacturing at the sub-micron level : _bproceedings : 19-21 November 1991, London, United Kingdom / _cLionel R. Baker, chair/editor ; organised by Sira Communications Ltd. ; cosponsored by SPIE--the International Society for Optical Engineering, American Society for Precision Engineering, the Institute of Manufacturing Engineers.
260			_aBellingham, Wash. : _bSPIE--the International Society for Optical Engineering, _cc1992.
300			_a237 p. : _bill. ; _c28 cm.
490	1		_aSPIE proceedings series ; _vv. 1573
504			_aIncludes bibliographical references and index.
590			_a0.00
650		0	_aOptical instruments _xDesign and construction _vCongresses _950271
650		0	_aInstrument manufacture _vCongresses _950272
650		0	_aManufacturing processes _vCongresses _950273
700	1		_aBaker, L. R. _q(Lionel R.) _916990
710	2		_aSira Communications Ltd. _924304
830		0	_aProceedings of SPIE--the International Society for Optical Engineering ; _vv. 1573. _910479
902			_a150908
903			_aMARS
907			_a.b1009975x _bcstor _c-
942			_n0
998			_b1 _c010425 _dm _ea _f- _g0
999			_c9909 _d9909