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Metallization : performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California / Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering. - Bellingham, Wash. : SPIE, c1991. - vii, 159 p. : ill. ; 28 cm. - Proceedings / SPIE--the International Society for Optical Engineering ; v. 1596 . - Proceedings of SPIE--the International Society for Optical Engineering ; v. 1596. .

Includes bibliographical references and index.

ISBN: 0819407275 (pbk.) 9780819407276

LCCN: 91067549

Subjects--Topical Terms:
Integrated circuits--Very large scale integration--Reliability--Congresses
Metallic films--Congresses
Vapor-plating--Congresses
Integrated circuits--Very large scale integration--Testing--Congresses
Metallizing--Congresses
Electronics: circuits & components