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Metallization : performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California / Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

Contributor(s): Material type: TextTextSeries: Proceedings / SPIE--the International Society for Optical Engineering ; v. 1596 | Proceedings of SPIE--the International Society for Optical Engineering ; v. 1596.Publication details: Bellingham, Wash. : SPIE, c1991.Description: vii, 159 p. : ill. ; 28 cmISBN:
  • 0819407275 (pbk.)
  • 9780819407276
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Includes bibliographical references and index.

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