Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California /
Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California /
Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Bellingham, Wash. : SPIE, c1992.
- ix, 207 p. : ill. ; 28 cm.
- Proceedings / SPIE--the International Society for Optical Engineering ; v. 1595 .
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1595. .
"Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix.
Includes bibliographical references and index.
0819407267 9780819407269
91067548
Semiconductors--Heat treatment--Congresses
Semiconductor doping--Congresses
Vapor-plating--Congresses
"Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix.
Includes bibliographical references and index.
0819407267 9780819407269
91067548
Semiconductors--Heat treatment--Congresses
Semiconductor doping--Congresses
Vapor-plating--Congresses