Rapid thermal and integrated processing : (Record no. 11233)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01577cam a2200361 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 25684134 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20201215151655.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 980303s1992 waua b 101 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 91067548 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0819407267 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819407269 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DLC |
| Transcribing agency | DLC |
| Modifying agency | OCL |
| 049 ## - LOCAL HOLDINGS (OCLC) | |
| Holding library | TIZA |
| 245 00 - TITLE STATEMENT | |
| Title | Rapid thermal and integrated processing : |
| Remainder of title | 10-11 September 1991, San Jose, California / |
| Statement of responsibility, etc. | Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, Wash. : |
| Name of publisher, distributor, etc. | SPIE, |
| Date of publication, distribution, etc. | c1992. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 207 p. : |
| Other physical details | ill. ; |
| Dimensions | 28 cm. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Proceedings / SPIE--the International Society for Optical Engineering ; |
| Volume/sequential designation | v. 1595 |
| 500 ## - GENERAL NOTE | |
| General note | "Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| General subdivision | Heat treatment |
| Form subdivision | Congresses |
| 9 (RLIN) | 52563 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductor doping |
| Form subdivision | Congresses |
| 9 (RLIN) | 52564 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Vapor-plating |
| Form subdivision | Congresses |
| 9 (RLIN) | 52565 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Moslehi, Mehrdad M. |
| 9 (RLIN) | 29899 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Singh, Rajendra, |
| Dates associated with a name | 1946- |
| 9 (RLIN) | 24581 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kwong, Dim-Lee. |
| 9 (RLIN) | 29940 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Society of Photo-optical Instrumentation Engineers. |
| 9 (RLIN) | 13311 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Proceedings of SPIE--the International Society for Optical Engineering ; |
| Volume/sequential designation | v. 1595. |
| 9 (RLIN) | 10479 |
| 902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) | |
| a | 051022 |
| 903 ## - LOCAL DATA ELEMENT C, LDC (RLIN) | |
| a | MARS |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b10114130 |
| b | none |
| c | - |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Suppress in OPAC | 0 |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| Operator's initials, OID (RLIN) | 1 |
| Cataloger's initials, CIN (RLIN) | 010829 |
| First Date, FD (RLIN) | m |
| Local | a |
| -- | - |
| -- | 0 |
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