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Multilayer optics for advanced x-ray applications : 22-23 July 1991, San Diego, California /

Multilayer optics for advanced x-ray applications : 22-23 July 1991, San Diego, California / Natale M. Ceglio, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering. - Bellingham, Wash. : SPIE, c1992. - vii, 242 p. : ill. ; 28 cm. - Proceedings / SPIE--the International Society for Optical Engineering ; v. 1547 . - Proceedings of SPIE--the International Society for Optical Engineering ; v. 1547. .

"Part of a five-conference program ... held at SPIE's 1991 International Symposium on Optical Applied Science and Engineering, 21-26 July 1991"--P. v.

Includes bibliographical references and index.

0819406759 9780819406750

91062692


X-ray optics--Congresses
Thin films, Multilayered--Congresses
X-ray lithography--Congresses

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