Multilayer optics for advanced x-ray applications : 22-23 July 1991, San Diego, California / Natale M. Ceglio, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.

Contributor(s):

Ceglio, Natale M
Society of Photo-optical Instrumentation Engineers

Material type: Text

TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1547.Publication details: Bellingham, Wash. : SPIE, c1992.Description: vii, 242 p. : ill. ; 28 cmISBN:

0819406759
9780819406750

Subject(s):

X-ray optics -- Congresses
Thin films, Multilayered -- Congresses
X-ray lithography -- Congresses

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"Part of a five-conference program ... held at SPIE's 1991 International Symposium on Optical Applied Science and Engineering, 21-26 July 1991"--P. v.

Includes bibliographical references and index.

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