Fundamentals of semiconductor manufacturing and process control /
May, Gary S.
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - Hoboken, N.J. : Chichester : IEEE Wiley-Interscience, John Wiley [distributor], 2006. - xix, 463 p. : ill. ; 25 cm.
IT Carlow ebook IEEE ebook
Includes bibliographical references and index.
Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.
9780471784067: £47.50 0471784060 (cloth : alk. paper) 9780471784067 (cloth : alk. paper) 0471790281 (electronic bk.) 9780471790280 (electronic bk.)
2005028448
Semiconductors--Design and construction
Integrated circuits--Design and construction
Process control--Statistical methods
Electronics & communications engineering
Electronic devices & materials
Automatic control engineering
/ .M379 2006
621.38152
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - Hoboken, N.J. : Chichester : IEEE Wiley-Interscience, John Wiley [distributor], 2006. - xix, 463 p. : ill. ; 25 cm.
IT Carlow ebook IEEE ebook
Includes bibliographical references and index.
Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.
9780471784067: £47.50 0471784060 (cloth : alk. paper) 9780471784067 (cloth : alk. paper) 0471790281 (electronic bk.) 9780471790280 (electronic bk.)
2005028448
Semiconductors--Design and construction
Integrated circuits--Design and construction
Process control--Statistical methods
Electronics & communications engineering
Electronic devices & materials
Automatic control engineering
/ .M379 2006
621.38152