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Fundamentals of semiconductor manufacturing and process control / (Record no. 35497)

MARC details
000 -LEADER
fixed length control field 02541cam a2200601 a 4500
001 - CONTROL NUMBER
control field BDZ0007179187
003 - CONTROL NUMBER IDENTIFIER
control field StDuBDS
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20190531160422.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
fixed length control field m d
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr gn|
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 050928s2006 njua b 001 0 eng d
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2005028448
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780471784067:
Terms of availability £47.50
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471784060 (cloth : alk. paper)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780471784067 (cloth : alk. paper)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471790281 (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780471790280 (electronic bk.)
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)85820981
040 ## - CATALOGING SOURCE
Original cataloging agency StDuBDS
Language of cataloging eng
Transcribing agency StDuBDS
Modifying agency Uk
-- StDuBDSZ
049 ## - LOCAL HOLDINGS (OCLC)
Holding library TIZA
050 #0 - LIBRARY OF CONGRESS CALL NUMBER
Item number .M379 2006
072 #7 - SUBJECT CATEGORY CODE
Subject category code TJ
Source thema
072 #7 - SUBJECT CATEGORY CODE
Subject category code TJFD
Source thema
072 #7 - SUBJECT CATEGORY CODE
Subject category code TJFM
Source thema
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name May, Gary S.
245 10 - TITLE STATEMENT
Title Fundamentals of semiconductor manufacturing and process control /
Statement of responsibility, etc. Gary S. May, Costas J. Spanos.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Hoboken, N.J. :
Name of publisher, distributor, etc. IEEE Wiley-Interscience,
Place of publication, distribution, etc. Chichester :
Name of publisher, distributor, etc. John Wiley [distributor],
Date of publication, distribution, etc. 2006.
300 ## - PHYSICAL DESCRIPTION
Extent xix, 463 p. :
Other physical details ill. ;
Dimensions 25 cm.
500 ## - GENERAL NOTE
General note IT Carlow ebook
500 ## - GENERAL NOTE
General note IEEE ebook
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
General subdivision Design and construction
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits
General subdivision Design and construction
9 (RLIN) 4737
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Process control
General subdivision Statistical methods
9 (RLIN) 9581
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electronics & communications engineering
Source of heading or term thema
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electronic devices & materials
Source of heading or term thema
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Automatic control engineering
Source of heading or term thema
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Spanos, Costas J.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element John Wiley & Sons.
776 1# - ADDITIONAL PHYSICAL FORM ENTRY
Qualifying information Original
International Standard Book Number 0471784060
Record control number (DLC) 2005028448
-- (OCoLC)61821738
856 41 - ELECTRONIC LOCATION AND ACCESS
Materials specified Table of contents
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/toc/ecip061/2005028448.html">http://www.loc.gov/catdir/toc/ecip061/2005028448.html</a>
856 40 - ELECTRONIC LOCATION AND ACCESS
Link text Read this electronic book via the web
Uniform Resource Identifier <a href="http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952">http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952</a>
856 41 - ELECTRONIC LOCATION AND ACCESS
Link text Send a message to library staff if access to this online resource is unavailable
Uniform Resource Identifier <a href="mailto:libdesk@itcarlow.ie?subject=Resource%20unavailable">mailto:libdesk@itcarlow.ie?subject=Resource%20unavailable</a>
902 ## - LOCAL DATA ELEMENT B, LDB (RLIN)
a 160105
907 ## - LOCAL DATA ELEMENT G, LDG (RLIN)
a .b10373676
b none
c -
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Suppress in OPAC 0
Source of classification or shelving scheme Dewey Decimal Classification
998 ## - LOCAL CONTROL INFORMATION (RLIN)
Operator's initials, OID (RLIN) 0
Cataloger's initials, CIN (RLIN) 101125
First Date, FD (RLIN) m
Local h
-- -
-- 0

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