Fundamentals of semiconductor manufacturing and process control / (Record no. 35497)
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000 -LEADER | |
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fixed length control field | 02541cam a2200601 a 4500 |
001 - CONTROL NUMBER | |
control field | BDZ0007179187 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | StDuBDS |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20190531160422.0 |
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
fixed length control field | m d |
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
fixed length control field | cr gn| |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 050928s2006 njua b 001 0 eng d |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
LC control number | 2005028448 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780471784067: |
Terms of availability | £47.50 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0471784060 (cloth : alk. paper) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780471784067 (cloth : alk. paper) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0471790281 (electronic bk.) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780471790280 (electronic bk.) |
035 ## - SYSTEM CONTROL NUMBER | |
System control number | (OCoLC)85820981 |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | StDuBDS |
Language of cataloging | eng |
Transcribing agency | StDuBDS |
Modifying agency | Uk |
-- | StDuBDSZ |
049 ## - LOCAL HOLDINGS (OCLC) | |
Holding library | TIZA |
050 #0 - LIBRARY OF CONGRESS CALL NUMBER | |
Item number | .M379 2006 |
072 #7 - SUBJECT CATEGORY CODE | |
Subject category code | TJ |
Source | thema |
072 #7 - SUBJECT CATEGORY CODE | |
Subject category code | TJFD |
Source | thema |
072 #7 - SUBJECT CATEGORY CODE | |
Subject category code | TJFM |
Source | thema |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.38152 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | May, Gary S. |
245 10 - TITLE STATEMENT | |
Title | Fundamentals of semiconductor manufacturing and process control / |
Statement of responsibility, etc. | Gary S. May, Costas J. Spanos. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Hoboken, N.J. : |
Name of publisher, distributor, etc. | IEEE Wiley-Interscience, |
Place of publication, distribution, etc. | Chichester : |
Name of publisher, distributor, etc. | John Wiley [distributor], |
Date of publication, distribution, etc. | 2006. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xix, 463 p. : |
Other physical details | ill. ; |
Dimensions | 25 cm. |
500 ## - GENERAL NOTE | |
General note | IT Carlow ebook |
500 ## - GENERAL NOTE | |
General note | IEEE ebook |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc. note | Includes bibliographical references and index. |
505 0# - FORMATTED CONTENTS NOTE | |
Formatted contents note | Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Semiconductors |
General subdivision | Design and construction |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Integrated circuits |
General subdivision | Design and construction |
9 (RLIN) | 4737 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Process control |
General subdivision | Statistical methods |
9 (RLIN) | 9581 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Electronics & communications engineering |
Source of heading or term | thema |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Electronic devices & materials |
Source of heading or term | thema |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Automatic control engineering |
Source of heading or term | thema |
700 1# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Spanos, Costas J. |
710 2# - ADDED ENTRY--CORPORATE NAME | |
Corporate name or jurisdiction name as entry element | John Wiley & Sons. |
776 1# - ADDITIONAL PHYSICAL FORM ENTRY | |
Qualifying information | Original |
International Standard Book Number | 0471784060 |
Record control number | (DLC) 2005028448 |
-- | (OCoLC)61821738 |
856 41 - ELECTRONIC LOCATION AND ACCESS | |
Materials specified | Table of contents |
Uniform Resource Identifier | <a href="http://www.loc.gov/catdir/toc/ecip061/2005028448.html">http://www.loc.gov/catdir/toc/ecip061/2005028448.html</a> |
856 40 - ELECTRONIC LOCATION AND ACCESS | |
Link text | Read this electronic book via the web |
Uniform Resource Identifier | <a href="http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952">http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952</a> |
856 41 - ELECTRONIC LOCATION AND ACCESS | |
Link text | Send a message to library staff if access to this online resource is unavailable |
Uniform Resource Identifier | <a href="mailto:libdesk@itcarlow.ie?subject=Resource%20unavailable">mailto:libdesk@itcarlow.ie?subject=Resource%20unavailable</a> |
902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) | |
a | 160105 |
907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
a | .b10373676 |
b | none |
c | - |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Suppress in OPAC | 0 |
Source of classification or shelving scheme | Dewey Decimal Classification |
998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
Operator's initials, OID (RLIN) | 0 |
Cataloger's initials, CIN (RLIN) | 101125 |
First Date, FD (RLIN) | m |
Local | h |
-- | - |
-- | 0 |
No items available.