Cold plasma in materials fabrication from fundamentals to applications /
Grill, Alfred.
Cold plasma in materials fabrication from fundamentals to applications / [electronic resource] : Alfred Grill. - Piscataway, NJ : New York : IEEE Press ; Institute of Electrical and Electronics Engineers, c1994. - xiii, 257 p. : ill. ; 24 cm.
IEEE ebook IT Carlow ebook
Includes bibliographical references and index.
1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
Electronic reproduction.
Piscataway, N.J. :
IEEE,
2010.
Mode of access: World Wide Web.
System requirements: Web browser.
Title from title screen (viewed on Mar. 15, 2010).
Access may be restricted to users at subscribing institutions.
9780470544273 0470544279
9780470544273 IEEE http://ieeexplore.ieee.org
Plasma engineering.
Low temperature plasmas.
Manufacturing processes.
Electronic books.
621.044
Cold plasma in materials fabrication from fundamentals to applications / [electronic resource] : Alfred Grill. - Piscataway, NJ : New York : IEEE Press ; Institute of Electrical and Electronics Engineers, c1994. - xiii, 257 p. : ill. ; 24 cm.
IEEE ebook IT Carlow ebook
Includes bibliographical references and index.
1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
Electronic reproduction.
Piscataway, N.J. :
IEEE,
2010.
Mode of access: World Wide Web.
System requirements: Web browser.
Title from title screen (viewed on Mar. 15, 2010).
Access may be restricted to users at subscribing institutions.
9780470544273 0470544279
9780470544273 IEEE http://ieeexplore.ieee.org
Plasma engineering.
Low temperature plasmas.
Manufacturing processes.
Electronic books.
621.044