Cold plasma in materials fabrication (Record no. 35761)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02059cam a2200409Ia 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20171116154432.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
| fixed length control field | m d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr cn| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 100317s1994 njua ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780470544273 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0470544279 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)557450028 |
| 037 ## - SOURCE OF ACQUISITION | |
| Stock number | 9780470544273 |
| Source of stock number/acquisition | IEEE |
| Note | http://ieeexplore.ieee.org |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | IEEEE |
| Language of cataloging | eng |
| Transcribing agency | IEEEE |
| 049 ## - LOCAL HOLDINGS (OCLC) | |
| Holding library | TIZA |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.044 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Grill, Alfred. |
| 245 10 - TITLE STATEMENT | |
| Title | Cold plasma in materials fabrication |
| Medium | [electronic resource] : |
| Remainder of title | from fundamentals to applications / |
| Statement of responsibility, etc. | Alfred Grill. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Piscataway, NJ : |
| Name of publisher, distributor, etc. | IEEE Press ; |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | Institute of Electrical and Electronics Engineers, |
| Date of publication, distribution, etc. | c1994. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiii, 257 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 500 ## - GENERAL NOTE | |
| General note | IEEE ebook |
| 500 ## - GENERAL NOTE | |
| General note | IT Carlow ebook |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching. |
| 533 ## - REPRODUCTION NOTE | |
| Type of reproduction | Electronic reproduction. |
| Place of reproduction | Piscataway, N.J. : |
| Agency responsible for reproduction | IEEE, |
| Date of reproduction | 2010. |
| Note about reproduction | Mode of access: World Wide Web. |
| -- | System requirements: Web browser. |
| -- | Title from title screen (viewed on Mar. 15, 2010). |
| -- | Access may be restricted to users at subscribing institutions. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Low temperature plasmas. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Manufacturing processes. |
| 9 (RLIN) | 5357 |
| 655 #7 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Electronic books. |
| Source of term | local |
| 776 1# - ADDITIONAL PHYSICAL FORM ENTRY | |
| Qualifying information | Original |
| International Standard Book Number | 0780310551 |
| -- | 9780780310551 |
| -- | 0780347145 |
| -- | 9780780347144 |
| Record control number | (DLC) 93042135 |
| -- | (OCoLC)29477985 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Link text | Read this electronic book via the web |
| Uniform Resource Identifier | <a href="http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223">http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223</a> |
| 856 41 - ELECTRONIC LOCATION AND ACCESS | |
| Link text | Send a message to library staff if access to this online resource is unavailable |
| Uniform Resource Identifier | <a href="mailto:libdesk@itcarlow.ie?subject=Resource%20unavailable">mailto:libdesk@itcarlow.ie?subject=Resource%20unavailable</a> |
| 902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) | |
| a | 160105 |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b10376331 |
| b | none |
| c | - |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Suppress in OPAC | 0 |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| Operator's initials, OID (RLIN) | 0 |
| Cataloger's initials, CIN (RLIN) | 101125 |
| First Date, FD (RLIN) | m |
| Local | h |
| -- | - |
| -- | 0 |
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