Normal view MARC view ISBD view

Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California / Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering. - Bellingham, Wash. : SPIE, c1993. - ix, 344 p. : ill. ; 28 cm. - Proceedings / SPIE--the International Society for Optical Engineering ; v. 1805 . - Proceedings of SPIE--the International Society for Optical Engineering ; v. 1805. .

Includes bibliographical references and index.

ISBN: 0819410039 9780819410030

LCCN: 92062654

Subjects--Topical Terms:
Integrated circuits--Design and construction--Congresses
Metallic films--Congresses
Metallizing--Congresses
Electrodiffusion--Congresses
Semiconductor-metal boundaries--Congresses

Dewey Class. No.: 621.38152