MARC details
000 -LEADER |
fixed length control field |
01649cam a2200409 a 4500 |
001 - CONTROL NUMBER |
control field |
28271722 |
005 - DATE AND TIME OF LATEST TRANSACTION |
control field |
20201215151519.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
931007s1993 waua b 101 0 eng d |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
LC control number |
92062654 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0819410039 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9780819410030 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
OWpIT |
Transcribing agency |
DLC |
Modifying agency |
OCL |
042 ## - AUTHENTICATION CODE |
Authentication code |
lccopycat |
049 ## - LOCAL HOLDINGS (OCLC) |
Holding library |
TIZA |
Local codes |
30464 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.38152 |
245 00 - TITLE STATEMENT |
Title |
Submicrometer metallization : |
Remainder of title |
the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California / |
Statement of responsibility, etc. |
Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
Bellingham, Wash. : |
Name of publisher, distributor, etc. |
SPIE, |
Date of publication, distribution, etc. |
c1993. |
300 ## - PHYSICAL DESCRIPTION |
Extent |
ix, 344 p. : |
Other physical details |
ill. ; |
Dimensions |
28 cm. |
490 1# - SERIES STATEMENT |
Series statement |
Proceedings / SPIE--the International Society for Optical Engineering ; |
Volume/sequential designation |
v. 1805 |
504 ## - BIBLIOGRAPHY, ETC. NOTE |
Bibliography, etc. note |
Includes bibliographical references and index. |
590 ## - LOCAL NOTE (RLIN) |
a |
0.00 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Integrated circuits |
General subdivision |
Design and construction |
Form subdivision |
Congresses |
9 (RLIN) |
46501 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Metallic films |
Form subdivision |
Congresses |
9 (RLIN) |
50259 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Metallizing |
Form subdivision |
Congresses |
9 (RLIN) |
50260 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Electrodiffusion |
Form subdivision |
Congresses |
9 (RLIN) |
50261 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Semiconductor-metal boundaries |
Form subdivision |
Congresses |
9 (RLIN) |
50262 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Kwok, Thomas. |
9 (RLIN) |
25461 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Kikkawa, Takamaro. |
9 (RLIN) |
25462 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Shenai, Krishna. |
9 (RLIN) |
24176 |
710 2# - ADDED ENTRY--CORPORATE NAME |
Corporate name or jurisdiction name as entry element |
Society of Photo-optical Instrumentation Engineers. |
9 (RLIN) |
13311 |
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
Uniform title |
Proceedings of SPIE--the International Society for Optical Engineering ; |
Volume/sequential designation |
v. 1805. |
9 (RLIN) |
10479 |
902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) |
a |
150908 |
903 ## - LOCAL DATA ELEMENT C, LDC (RLIN) |
a |
MARS |
907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
a |
.b10099700 |
b |
cstor |
c |
- |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Suppress in OPAC |
0 |
998 ## - LOCAL CONTROL INFORMATION (RLIN) |
Operator's initials, OID (RLIN) |
1 |
Cataloger's initials, CIN (RLIN) |
010425 |
First Date, FD (RLIN) |
m |
Local |
a |
-- |
- |
-- |
0 |