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Principles of lithography / (Record no. 17367)

MARC details
000 -LEADER
fixed length control field 01556cam a22004214a 4500
001 - CONTROL NUMBER
control field BDZ0002874051
003 - CONTROL NUMBER IDENTIFIER
control field StDuBDS
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20201215152756.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 001128s2001 waua b 001 0 eng d
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 00067126
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780819440457
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0819440450
035 ## - SYSTEM CONTROL NUMBER
System control number (DLC)00067126
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency DLC
-- StDuBDSZ
042 ## - AUTHENTICATION CODE
Authentication code pcc
050 #0 - LIBRARY OF CONGRESS CALL NUMBER
Item number .L397 2001
072 #7 - SUBJECT CATEGORY CODE
Subject category code KNT
Source thema
072 #7 - SUBJECT CATEGORY CODE
Subject category code TJFC
Source thema
072 #7 - SUBJECT CATEGORY CODE
Subject category code TTB
Source thema
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381531
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Levinson, Harry J.
9 (RLIN) 27079
245 10 - TITLE STATEMENT
Title Principles of lithography /
Statement of responsibility, etc. Harry J. Levinson.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Bellingham, Wash., USA :
Name of publisher, distributor, etc. SPIE Press,
Date of publication, distribution, etc. c2001.
300 ## - PHYSICAL DESCRIPTION
Extent x, 373 p. :
Other physical details ill. ;
Dimensions 26 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
505 #0 - FORMATTED CONTENTS NOTE
Formatted contents note Overview of lithography -- Optical pattern formation -- Photoresists -- Modeling and thin film effects -- Wafer steppers -- Overlay -- Masks and reticles -- Overcoming the diffraction limit -- Metrology -- The limits of optical lithography -- Lithography costs -- Alternative lithography techniques.
590 ## - LOCAL NOTE (RLIN)
a 99.18
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits
General subdivision Design and construction
9 (RLIN) 4737
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography.
9 (RLIN) 5633
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Media, entertainment, information & communication industries
Source of heading or term thema
9 (RLIN) 66357
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electronics: circuits & components
Source of heading or term thema
9 (RLIN) 66358
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Applied optics
Source of heading or term thema
9 (RLIN) 31387
902 ## - LOCAL DATA ELEMENT B, LDB (RLIN)
a 140901
903 ## - LOCAL DATA ELEMENT C, LDC (RLIN)
a MARS
907 ## - LOCAL DATA ELEMENT G, LDG (RLIN)
a .b10188861
b cgen
c -
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Suppress in OPAC 0
998 ## - LOCAL CONTROL INFORMATION (RLIN)
Operator's initials, OID (RLIN) 1
Cataloger's initials, CIN (RLIN) 030220
First Date, FD (RLIN) m
Local a
-- -
-- 0
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Cost, normal purchase price Total Checkouts Total Renewals Full call number Barcode Date last seen Copy number Cost, replacement price Price effective from Koha item type
    Dewey Decimal Classification     Carlow Campus Library Carlow Campus Library General Lending 20/02/2003 99.18 2 2 621.381531 42113 03/07/2017 1 99.18 03/07/2017 General Lending

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