MARC details
000 -LEADER |
fixed length control field |
01556cam a22004214a 4500 |
001 - CONTROL NUMBER |
control field |
BDZ0002874051 |
003 - CONTROL NUMBER IDENTIFIER |
control field |
StDuBDS |
005 - DATE AND TIME OF LATEST TRANSACTION |
control field |
20201215152756.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
001128s2001 waua b 001 0 eng d |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
LC control number |
00067126 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9780819440457 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0819440450 |
035 ## - SYSTEM CONTROL NUMBER |
System control number |
(DLC)00067126 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
DLC |
Transcribing agency |
DLC |
Modifying agency |
DLC |
-- |
StDuBDSZ |
042 ## - AUTHENTICATION CODE |
Authentication code |
pcc |
050 #0 - LIBRARY OF CONGRESS CALL NUMBER |
Item number |
.L397 2001 |
072 #7 - SUBJECT CATEGORY CODE |
Subject category code |
KNT |
Source |
thema |
072 #7 - SUBJECT CATEGORY CODE |
Subject category code |
TJFC |
Source |
thema |
072 #7 - SUBJECT CATEGORY CODE |
Subject category code |
TTB |
Source |
thema |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.381531 |
100 1# - MAIN ENTRY--PERSONAL NAME |
Personal name |
Levinson, Harry J. |
9 (RLIN) |
27079 |
245 10 - TITLE STATEMENT |
Title |
Principles of lithography / |
Statement of responsibility, etc. |
Harry J. Levinson. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
Bellingham, Wash., USA : |
Name of publisher, distributor, etc. |
SPIE Press, |
Date of publication, distribution, etc. |
c2001. |
300 ## - PHYSICAL DESCRIPTION |
Extent |
x, 373 p. : |
Other physical details |
ill. ; |
Dimensions |
26 cm. |
504 ## - BIBLIOGRAPHY, ETC. NOTE |
Bibliography, etc. note |
Includes bibliographical references and index. |
505 #0 - FORMATTED CONTENTS NOTE |
Formatted contents note |
Overview of lithography -- Optical pattern formation -- Photoresists -- Modeling and thin film effects -- Wafer steppers -- Overlay -- Masks and reticles -- Overcoming the diffraction limit -- Metrology -- The limits of optical lithography -- Lithography costs -- Alternative lithography techniques. |
590 ## - LOCAL NOTE (RLIN) |
a |
99.18 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Integrated circuits |
General subdivision |
Design and construction |
9 (RLIN) |
4737 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Microlithography. |
9 (RLIN) |
5633 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Media, entertainment, information & communication industries |
Source of heading or term |
thema |
9 (RLIN) |
66357 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Electronics: circuits & components |
Source of heading or term |
thema |
9 (RLIN) |
66358 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Applied optics |
Source of heading or term |
thema |
9 (RLIN) |
31387 |
902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) |
a |
140901 |
903 ## - LOCAL DATA ELEMENT C, LDC (RLIN) |
a |
MARS |
907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
a |
.b10188861 |
b |
cgen |
c |
- |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Suppress in OPAC |
0 |
998 ## - LOCAL CONTROL INFORMATION (RLIN) |
Operator's initials, OID (RLIN) |
1 |
Cataloger's initials, CIN (RLIN) |
030220 |
First Date, FD (RLIN) |
m |
Local |
a |
-- |
- |
-- |
0 |