Principles of lithography / Harry J. Levinson.
Material type:
TextPublication details: Bellingham, Wash., USA : SPIE Press, c2001.Description: x, 373 p. : ill. ; 26 cmISBN: - 9780819440457
- 0819440450
- 621.381531
- .L397 2001
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| General Lending | Carlow Campus Library General Lending | 621.381531 (Browse shelf(Opens below)) | 1 | Available | 42113 |
Includes bibliographical references and index.
Overview of lithography -- Optical pattern formation -- Photoresists -- Modeling and thin film effects -- Wafer steppers -- Overlay -- Masks and reticles -- Overcoming the diffraction limit -- Metrology -- The limits of optical lithography -- Lithography costs -- Alternative lithography techniques.
99.18