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The physics of microfabrication / Ivor Brodie and Julius J. Muray.

By: Contributor(s): Material type: TextTextPublication details: New York : Plenum Press, c1982.Description: xix, 503 p. : ill. ; 24 cmISBN:
  • 0306408635
  • 9780306408632 :
Subject(s): DDC classification:
  • 621.3817

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