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Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California / Barbara Vasquez ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

Contributor(s): Material type: TextTextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1802.Publication details: Bellingham, Wash. : SPIE, c1993.Description: x, 258 p. : ill. ; 28 cmISBN:
  • 0819410004
  • 9780819410009
Subject(s): DDC classification:
  • 621.381

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