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10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California / sponsored by Bacus International. by Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1496.
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1991
Availability: Items available for loan: Carlow Campus Library (1)Call number: 621.38152.
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