Excimer lasers : applications, beam delivery systems, and laser design : 18-19 November 1992, Boston, Massachusetts / James A. Greer, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Material type: TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1835.Publication details: Bellingham, Wash., USA : SPIE, c1993.Description: vii, 222 p. : ill. ; 28 cmISBN:- 0819410365 (pbk.)
- 9780819410368
- 621.366
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Includes bibliographical references and index.
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