The physics of microfabrication / Ivor Brodie and Julius J. Muray.

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Material type: Text

TextPublication details: New York : Plenum Press, c1982.Description: xix, 503 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
General Lending	Carlow Campus Library Store - Ask Library Staff	621.3817 (Browse shelf(Opens below))	1	Available		16924

Includes bibliographical references and index.

43.41