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11th annual Symposium on Photomask Technology : proceedings : September 25-27, 1991, Sunnyvale, California / sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology.
Material type:
TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1604.Publication details: Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1992.Description: vii, 348 p. : ill. ; 28 cmISBN: - 081940733X (pbk.)
- 9780819407337
- 621.3815
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| General Lending | Carlow Campus Library Store - Ask Library Staff | 621.3815 (Browse shelf(Opens below)) | 1 | Available | 30384 |
Includes bibliographical references and index.
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