Metallization : performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California / Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
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- 0819407275 (pbk.)
- 9780819407276
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Includes bibliographical references and index.