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		Principles of lithography / Harry J. Levinson. by Levinson, Harry J Material type: Text; Format: print ; Literary form: Not fiction Publication details: Bellingham, Wash., USA : SPIE Press, c2001 Availability: Items available for loan: Carlow Campus Library (1)Call number: 621.381531. Place hold Place recall Add to cart (remove)
		No cover image available Handbook of microlithography, micromachining, and microfabrication : Volume 1: microlithography / P. Rai-Choudhury, editor. by Rai-Choudhury, P Series: SPIE Press monograph ; PM39-PM40 \| IEE materials & devices series ; 12A-12B. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, c1997 Other title: Microlithography, micromachining, and microfabrication Availability: Items available for reference: Carlow Campus Library: Not for loan (1)Call number: 621.381531. Place recall Add to cart (remove)
		No cover image available Handbook of microlithography, micromaching, and microfabrication : Volume 2 : micromachining and microfabrication / P. Rai-Choudhury, editor. by Rai-Choudhury, P Series: SPIE Press monograph ; PM39-PM40 \| IEE materials & devices series ; 12. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Bellingham, Wa. : London : SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997 Availability: Items available for reference: Carlow Campus Library: Not for loan (1)Call number: 621.381531. Place recall Add to cart (remove)

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