Principles of lithography / Harry J. Levinson.
Material type:![Text](/opac-tmpl/lib/famfamfam/BK.png)
- 9780819440457
- 0819440450
- 621.381531
- .L397 2001
Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
General Lending | Carlow Campus Library General Lending | 621.381531 (Browse shelf(Opens below)) | 1 | Available | 42113 |
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621.381528 Transistor circuit techniques : discrete and integrated / | 621.38153 Digital electronics / | 621.38153 Designing microprocessor-based digital circuitry / | 621.381531 Principles of lithography / | 621.381532 Transducers and interfacing : principles and techniques / | 621.381532 Introduction to digital filtering, | 621.3815324 Filter handbook. |
Includes bibliographical references and index.
Overview of lithography -- Optical pattern formation -- Photoresists -- Modeling and thin film effects -- Wafer steppers -- Overlay -- Masks and reticles -- Overcoming the diffraction limit -- Metrology -- The limits of optical lithography -- Lithography costs -- Alternative lithography techniques.
99.18