Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California / Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

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Item type	Current library	Call number	Copy number	Status	Date due	Barcode
General Lending	Carlow Campus Library Store - Ask Library Staff	621.38152 (Browse shelf(Opens below))	1	Available		30464

Includes bibliographical references and index.

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