Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California / Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Material type: TextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1595.Publication details: Bellingham, Wash. : SPIE, c1992.Description: ix, 207 p. : ill. ; 28 cmISBN:- 0819407267
- 9780819407269
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"Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix.
Includes bibliographical references and index.