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Cold plasma in materials fabrication [electronic resource] : from fundamentals to applications / Alfred Grill.

By: Material type: TextTextPublication details: Piscataway, NJ : IEEE Press ; New York : Institute of Electrical and Electronics Engineers, c1994.Description: xiii, 257 p. : ill. ; 24 cmISBN:
  • 9780470544273
  • 0470544279
Subject(s): Genre/Form: Additional physical formats: No titleDDC classification:
  • 621.044
Online resources:
Contents:
1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
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IEEE ebook

IT Carlow ebook

Includes bibliographical references and index.

1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.

Electronic reproduction. Piscataway, N.J. : IEEE, 2010. Mode of access: World Wide Web. System requirements: Web browser. Title from title screen (viewed on Mar. 15, 2010). Access may be restricted to users at subscribing institutions.

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