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Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

By: Contributor(s): Material type: TextTextPublication details: Hoboken, N.J. : IEEE Wiley-Interscience, Chichester : John Wiley [distributor], 2006.Description: xix, 463 p. : ill. ; 25 cmISBN:
  • 9780471784067:
  • 0471784060 (cloth : alk. paper)
  • 9780471784067 (cloth : alk. paper)
  • 0471790281 (electronic bk.)
  • 9780471790280 (electronic bk.)
Subject(s): Additional physical formats: No titleDDC classification:
  • 621.38152
LOC classification:
  • .M379 2006
Online resources:
Contents:
Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.
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IT Carlow ebook

IEEE ebook

Includes bibliographical references and index.

Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.

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