Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.
Material type:![Text](/opac-tmpl/lib/famfamfam/BK.png)
- 9780471784067:
- 0471784060 (cloth : alk. paper)
- 9780471784067 (cloth : alk. paper)
- 0471790281 (electronic bk.)
- 9780471790280 (electronic bk.)
- 621.38152
- .M379 2006
IT Carlow ebook
IEEE ebook
Includes bibliographical references and index.
Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.