Cold plasma in materials fabrication [electronic resource] : from fundamentals to applications / Alfred Grill.
Material type: TextPublication details: Piscataway, NJ : IEEE Press ; New York : Institute of Electrical and Electronics Engineers, c1994.Description: xiii, 257 p. : ill. ; 24 cmISBN:- 9780470544273
- 0470544279
- 621.044
IEEE ebook
IT Carlow ebook
Includes bibliographical references and index.
1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
Electronic reproduction. Piscataway, N.J. : IEEE, 2010. Mode of access: World Wide Web. System requirements: Web browser. Title from title screen (viewed on Mar. 15, 2010). Access may be restricted to users at subscribing institutions.